There is an ancient Shiva temple in the vedapatasalai at Thiruvanaikaval with three sets of Shiva and parvathy. I was able to visit this temple recently
How to Reach:
In Tiruvanaikaval next to the Jumbukeshwarar Akhilandeshwari koil in the Mada street is the Kanchi mutt run Vedapatashala. There is a very ancient Shiva temple here with many features. The original Lord is Raja Rajeshwarar with consort RajaRajeshwari in the main sannidhi. There are Separate sannidhis for a rare huge Panchamukheshwarar which was discovered by Mahaperiyava and installed here with his consort Tripurasundari. The Sivalingam has faces carved on all sides
There is also a rare Chaturshashti kaleshwarar with Chaturshashtikaleshwari . I could not take many photos . The Sivalingam here has 64 facets on it and is mounted on a square avudayar
The ambience and experience were excellent!! 
Murugan sannithi
Back side of main temple
Ambal Rajarajeshwari sannidhi from outside
